¢Æ Ga(4x10^18)-doped Liquid Silicon DensityÀÇ ÂüÁ¶Ç¥ÁØ |
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ÂüÁ¶Ç¥ÁØ ¹øÈ£ |
KSRD.01.2008.001.073 |
ÂüÁ¶Ç¥ÁØ µî±Þ |
À¯È¿ ÂüÁ¶Ç¥ÁØ |
T/K |
¥ñ[Kg/m3] |
1127.34016 |
2.71973 |
1143.02367 |
2.59865 |
1180.74885 |
2.55898 |
1203.53232 |
2.4475 |
1226.95161 |
2.49365 |
1234.68739 |
2.54784 |
1261.39173 |
2.69743 |
1266.58425 |
2.51595 |
1265.31261 |
2.4602 |
1287.46026 |
2.64636 |
1312.787 |
2.66243 |
1325.18545 |
2.55406 |
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T/K |
¥ñ[Kg/m3] |
1345.31968 |
2.62406 |
1383.04486 |
2.54291 |
1391.52243 |
2.52061 |
1394.17167 |
2.57013 |
1415.57753 |
2.40913 |
1427.34016 |
2.43635 |
1470.25786 |
2.39953 |
1552.91416 |
2.49365 |
1606.95867 |
2.49831 |
1649.24055 |
2.47602 |
1691.52243 |
2.36453 |
49.9 |
0.0871 |
54.7 |
0.0978 |
60.4 |
0.112 |
65.2 |
0.124 |
70 |
0.134 |
74.8 |
0.145 |
80.3 |
0.155 |
85.3 |
0.164 |
90.5 |
0.172 |
95 |
0.188 |
97.6 |
0.193 |
703 |
1.146 |
808.8 |
1.275 |
844.4 |
1.417 |
13.75598 |
22492.32152 |
14.33212 |
23156.66705 |
14.6373 |
20329.22261 |
15.09891 |
17361.57335 |
15.90672 |
20643.07231 |
17.28623 |
22804.60158 |
17.6543 |
25976.32856 |
16.57294 |
28740.29888 |
19.59388 |
29543.891 |
20.6193 |
29139.32493 |
22.40751 |
27915.76359 |
24.8693 |
26336.98006 |
24.8693 |
24171.6349 |
26.7577 |
22804.60158 |
28.18927 |
20329.22261 |
29.36992 |
16404.79845 |
39.70971 |
13797.03115 |
49.40502 |
9363.76526 |
58.3459 |
6443.22945 |
64.75605 |
5502.65019 |
68.22057 |
4372.88917 |
80.56652 |
2967.7912 |
82.28202 |
2569.74398 |
82.28202 |
2322.61029 |
88.52995 |
2014.17971 |
93.2664 |
1795.54585 |
97.1727 |
1554.72296 |
103.39835 |
1346.19982 |
113.61854 |
1101.40707 |
120.89784 |
926.32334 |
128.64351 |
814.46548 |
134.18022 |
791.09914 |
142.77687 |
675.61491 |
153.61837 |
593.12188 |
144.20895 |
675.61491 |
163.46038 |
544.35723 |
173.93294 |
492.76044 |
183.23854 |
471.34674 |
191.12498 |
426.67024 |
194.97825 |
380.35632 |
212.12283 |
369.44421 |
225.7131 |
333.91456 |
232.83134 |
324.8321 |
240.17406 |
310.716 |
253.02363 |
285.16989 |
263.62107 |
276.9886 |
280.82195 |
261.7241 |
292.58367 |
246.92222 |
305.17624 |
229.76741 |
311.67432 |
210.87665 |
325 |
2.8036 |
330 |
2.844 |
335 |
2.8761 |
339.86 |
2.9074 |
0.4436 |
7.52382E-7 |
0.4452 |
7.38995E-7 |
0.4616 |
8.11268E-7 |
0.4713 |
7.8548E-7 |
0.4772 |
7.9747E-7 |
0.4815 |
8.1094E-7 |
0.4911 |
8.15867E-7 |
0.5055 |
8.31143E-7 |
0.5179 |
8.45926E-7 |
0.5292 |
8.55782E-7 |
0.5327 |
8.77957E-7 |
0.5376 |
8.90276E-7 |
0.5556 |
9.19842E-7 |
0.5614 |
9.42017E-7 |
0.5821 |
9.90473E-7 |
0.5843 |
9.84724E-7 |
0.6139 |
1.034E-6 |
0.6269 |
1.12106E-6 |
0.6297 |
1.10627E-6 |
0.6676 |
1.18265E-6 |
0.6788 |
1.18758E-6 |
0.7015 |
1.31078E-6 |
0.737 |
1.42329E-6 |
0.7395 |
1.44136E-6 |
0.7698 |
1.45286E-6 |
0.7758 |
1.53827E-6 |
0.7848 |
1.49228E-6 |
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¢Æ Ga(4x10^18)-doped Liquid Silicon DensityÀÇ ÂüÁ¶Ç¥ÁØ ±âº»Á¤º¸ |
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Á¦Ç°±Ô°Ý |
»ùÇÃÇü»ó : sphery10mmdia.
±¸Á¶ : single crystal
¹Ðµµ : 2.52 g/cm3 (1683K)
¼ººÐºÐ¼® : doped(Sb,B,Ga)
ºÒ¼ø¹° : 2x1016, 4x1018 (atoms/cm3) Ga |
ÃøÁ¤¹æ¹ý |
ÃøÁ¤¿Âµµ¿µ¿ª : (1100~1730) ¡É
½ÇÇè¹æ¹ý : Electro Magenetic Levitation |
ÀçÇö¼º |
»ùÇð¡°ø¹æ¹ý : normal
½Ã·áÁ¦Á¶¹ý : good
½ÇÇèÀýÂ÷ : good
½ÇÇèÁ¶°Ç : good |
ÃøÁ¤ºÒÈ®µµ |
5 % |
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¢Æ Ga(4x10^18)-doped Liquid Silicon DensityÀÇ ÂüÁ¶Ç¥ÁØ ¹®¼ÀÚ·á |
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- [±âŸ¹®¼] Langen et al., J. Crystal Growth, 186, p550~556, (1998)
- [±âŸ¹®¼] TPRC handbook
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