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첨단산업용 나노박막 복소굴절률

저속(0.5 nm/s 이하) 증착 금기판 복소굴절률

저속(0.5 nm/s 이하) 증착 금기판 복소굴절률

참조표준명 저속(0.5 nm/s 이하) 증착 금기판 복소굴절률
참조표준 번호 KSRD.02.2013.010.001.001
DOI 10.20925/KSRD.02.2013.010.001.001
참조표준 등급 검증 참조표준
측정대상 금기판의 파장별 복소굴절률
재료 규격 전자빔 증착방법으로 제작된 열처리하지 않은 금기판 2종
측정방법(실험방법) 타원계측기를 이용한 파장별 타원계측각 측정후 복소굴절률 계산
불확도(소급성) 세부평가절차서 첨부 A 불확도 분석참조
재현성 시료제작 방법, 단기 측정결과, 시편세척후 측정 결과의 재현성
일관성 증착속도에 따른 2종류 금기판의 일관된 측정결과
예측성 전자빔 증착방법에서 같은 공정조건에서 같은 증착속도로 제작된 금기판의 경우 동일한 굴절률 특성을 보임

저속(0.5 nm/s 이하) 증착 금기판 복소굴절률 참조표준

피측정 금기판의 산술평균된 복소굴절률 실수부 스펙트럼 srd
피측정 금기판의 산술평균된 복소굴절률 허수부 스펙트럼 srd
Low evaporation rate (0.5 nm/s 이하)
λ(nm) n k Uc,n Uc,k
141.4 1.273 1.078 0.043 0.034
141.81 1.271 1.065 0.026 0.028
142.21 1.281 1.088 0.039 0.02
142.62 1.275 1.072 0.017 0.024
143.03 1.28 1.081 0.025 0.031
143.45 1.282 1.079 0.02 0.0086
143.86 1.282 1.084 0.028 0.035
144.28 1.286 1.077 0.014 0.01
144.7 1.286 1.073 0.019 0.015
145.12 1.286 1.083 0.019 0.011
145.55 1.286 1.08 0.011 0.016
145.98 1.289 1.086 0.011 0.014
146.41 1.2897 1.087 0.0086 0.024
146.84 1.288 1.081 0.013 0.041
147.28 1.292 1.087 0.012 0.027
147.71 1.29 1.089 0.013 0.035
148.15 1.29 1.093 0.013 0.033
148.6 1.292 1.094 0.016 0.033
149.04 1.295 1.102 0.021 0.041
149.49 1.295 1.102 0.021 0.047
149.94 1.296 1.104 0.026 0.046
150.4 1.299 1.11 0.031 0.043
150.85 1.301 1.111 0.033 0.044
151.31 1.303 1.112 0.039 0.044
151.78 1.308 1.121 0.044 0.039
152.24 1.31 1.123 0.053 0.047
152.71 1.313 1.125 0.054 0.039
153.18 1.317 1.127 0.056 0.037
153.65 1.324 1.134 0.063 0.04
154.13 1.329 1.132 0.064 0.025
154.61 1.337 1.14 0.071 0.018
155.09 1.341 1.14 0.073 0.014
155.58 1.345 1.1391 0.072 0.008
156.07 1.353 1.1427 0.069 0.006
156.56 1.359 1.1405 0.069 0.0048
157.06 1.366 1.137 0.065 0.02
157.55 1.372 1.136 0.062 0.024
158.06 1.376 1.132 0.06 0.024
158.56 1.381 1.131 0.052 0.036
159.07 1.385 1.129 0.047 0.036
159.58 1.39 1.124 0.041 0.036
160.09 1.393 1.121 0.036 0.034
160.61 1.396 1.12 0.031 0.039
161.13 1.397 1.113 0.027 0.038
161.66 1.399 1.11 0.021 0.044
162.19 1.401 1.106 0.015 0.044
162.72 1.403 1.107 0.013 0.038
163.25 1.4023 1.099 0.0084 0.043
163.79 1.4035 1.098 0.0064 0.038
164.33 1.4032 1.091 0.0038 0.042
164.88 1.4031 1.086 0.0068 0.038
165.43 1.404 1.087 0.011 0.04
165.98 1.402 1.082 0.013 0.035
166.54 1.401 1.079 0.018 0.035
167.1 1.398 1.073 0.021 0.03
167.66 1.396 1.071 0.023 0.027
168.23 1.394 1.071 0.028 0.028
168.8 1.39 1.067 0.03 0.024
169.38 1.387 1.067 0.032 0.021
169.96 1.384 1.063 0.032 0.013
170.54 1.381 1.062 0.033 0.011
171.13 1.377 1.062 0.034 0.009
171.72 1.374 1.0594 0.035 0.0076
172.31 1.371 1.0595 0.035 0.0056
172.91 1.367 1.0627 0.034 0.006
173.52 1.364 1.062 0.035 0.0066
174.13 1.36 1.063 0.033 0.011
174.74 1.356 1.062 0.032 0.017
175.36 1.353 1.065 0.033 0.015
175.98 1.35 1.064 0.032 0.013
176.6 1.346 1.067 0.032 0.017
177.23 1.343 1.07 0.032 0.017
177.87 1.341 1.075 0.031 0.019
178.51 1.337 1.074 0.028 0.022
179.15 1.334 1.076 0.029 0.019
179.8 1.331 1.079 0.029 0.023
180.45 1.327 1.08 0.028 0.022
181.11 1.324 1.081 0.028 0.02
181.78 1.322 1.087 0.027 0.023
182.44 1.319 1.085 0.027 0.024
183.12 1.315 1.091 0.027 0.028
183.79 1.312 1.094 0.027 0.027
184.48 1.31 1.097 0.027 0.03
185.16 1.307 1.099 0.028 0.03
185.86 1.303 1.103 0.024 0.044
186.56 1.301 1.11 0.023 0.04
187.26 1.297 1.111 0.023 0.041
187.97 1.293 1.115 0.024 0.041
188.68 1.291 1.122 0.021 0.044
189.4 1.291 1.135 0.02 0.044
190.13 1.288 1.138 0.019 0.042
190.86 1.286 1.141 0.018 0.048
191.59 1.282 1.145 0.018 0.048
192.34 1.282 1.151 0.014 0.047
193.08 1.279 1.155 0.018 0.039
193.84 1.278 1.161 0.014 0.043
194.6 1.275 1.169 0.014 0.045
195.36 1.273 1.173 0.011 0.046
196.13 1.273 1.18 0.012 0.043
196.91 1.27 1.184 0.011 0.044
197.7 1.2707 1.192 0.0086 0.044
198.49 1.269 1.198 0.01 0.039
199.28 1.2687 1.203 0.0084 0.044
200.09 1.267 1.207 0.0094 0.041
200.89 1.2666 1.212 0.0076 0.041
201.71 1.2681 1.218 0.0088 0.039
202.53 1.263 1.22 0.012 0.037
203.36 1.263 1.231 0.01 0.039
204.2 1.2624 1.234 0.009 0.042
205.04 1.261 1.238 0.011 0.038
205.89 1.26 1.245 0.014 0.041
206.75 1.255 1.249 0.01 0.045
207.61 1.256 1.257 0.01 0.043
208.49 1.256 1.265 0.012 0.046
209.36 1.2522 1.265 0.0072 0.05
210.25 1.249 1.275 0.01 0.045
211.14 1.2504 1.284 0.0066 0.049
212.05 1.2495 1.292 0.0072 0.051
212.96 1.2471 1.301 0.0054 0.05
213.87 1.2513 1.31 0.0048 0.055
214.8 1.2469 1.312 0.0032 0.053
215.73 1.2476 1.322 0.005 0.053
216.67 1.2468 1.333 0.0042 0.048
217.62 1.2498 1.341 0.0056 0.047
218.58 1.2483 1.349 0.0042 0.047
219.55 1.2509 1.357 0.0068 0.048
220.52 1.2529 1.366 0.0058 0.048
221.5 1.2504 1.368 0.0066 0.041
222.5 1.2522 1.374 0.006 0.04
223.5 1.2549 1.385 0.0072 0.042
224.51 1.2557 1.388 0.0054 0.041
225.53 1.2549 1.399 0.0058 0.039
226.56 1.2561 1.4 0.008 0.045
227.59 1.2583 1.408 0.0068 0.043
228.64 1.2588 1.418 0.0052 0.041
229.7 1.2572 1.427 0.0058 0.043
230.77 1.2604 1.432 0.0058 0.04
231.84 1.2621 1.443 0.007 0.046
232.93 1.2606 1.449 0.007 0.046
234.03 1.2615 1.456 0.0048 0.043
235.14 1.2635 1.462 0.0072 0.043
236.26 1.2627 1.471 0.006 0.044
237.39 1.2654 1.482 0.0044 0.043
238.53 1.265 1.491 0.0054 0.045
239.68 1.2643 1.498 0.007 0.045
240.84 1.2677 1.506 0.0056 0.046
242.01 1.266 1.514 0.0082 0.047
243.2 1.2674 1.525 0.0062 0.045
244.4 1.2683 1.534 0.0064 0.047
245.6 1.272 1.542 0.01 0.048
246.82 1.27 1.552 0.008 0.048
248.06 1.275 1.562 0.011 0.05
249.3 1.276 1.571 0.01 0.049
250.56 1.275 1.585 0.011 0.052
251.83 1.282 1.593 0.011 0.054
253.11 1.282 1.604 0.014 0.054
254.41 1.287 1.616 0.014 0.054
255.72 1.286 1.627 0.015 0.055
257.05 1.289 1.642 0.02 0.054
258.38 1.293 1.656 0.019 0.056
259.73 1.298 1.667 0.022 0.056
261.1 1.303 1.678 0.024 0.054
262.48 1.309 1.691 0.029 0.054
263.87 1.318 1.705 0.03 0.053
265.28 1.325 1.718 0.034 0.051
266.71 1.332 1.729 0.038 0.049
268.15 1.342 1.738 0.04 0.049
269.6 1.353 1.752 0.044 0.045
271.08 1.36 1.765 0.044 0.041
272.56 1.375 1.776 0.045 0.038
274.07 1.388 1.784 0.046 0.035
275.59 1.4 1.794 0.047 0.03
277.13 1.415 1.799 0.046 0.027
278.68 1.425 1.805 0.045 0.022
280.25 1.436 1.809 0.042 0.019
281.85 1.446 1.815 0.041 0.018
283.45 1.46 1.813 0.04 0.015
285.08 1.47 1.819 0.036 0.015
286.73 1.475 1.82 0.036 0.013
288.39 1.485 1.824 0.033 0.014
290.08 1.495 1.829 0.033 0.011
291.78 1.506 1.831 0.03 0.012
293.51 1.513 1.834 0.03 0.013
295.25 1.522 1.837 0.03 0.011
297.02 1.526 1.84 0.029 0.011
298.8 1.537 1.84 0.029 0.012
300.61 1.544 1.842 0.027 0.01
302.44 1.555 1.848 0.027 0.008
304.3 1.562 1.845 0.026 0.011
306.17 1.57 1.851 0.027 0.01
308.07 1.578 1.851 0.024 0.011
309.99 1.585 1.8553 0.026 0.0086
311.94 1.592 1.8502 0.024 0.0078
313.91 1.602 1.8541 0.024 0.0072
315.91 1.609 1.859 0.024 0.011
317.93 1.612 1.8616 0.021 0.0072
319.98 1.624 1.8525 0.02 0.0078
322.06 1.631 1.853 0.019 0.012
324.16 1.641 1.856 0.015 0.011
326.29 1.644 1.845 0.016 0.016
328.45 1.648 1.842 0.014 0.017
330.63 1.65 1.839 0.011 0.014
332.85 1.653 1.832 0.0078 0.017
335.1 1.6531 1.822 0.0044 0.02
337.37 1.6557 1.812 0.0064 0.017
339.68 1.654 1.805 0.01 0.017
342.02 1.655 1.804 0.013 0.017
344.39 1.647 1.796 0.016 0.014
346.8 1.639 1.7828 0.017 0.0086
349.23 1.626 1.7832 0.02 0.0078
351.71 1.618 1.7808 0.021 0.007
354.22 1.606 1.7802 0.021 0.0058
356.76 1.594 1.7862 0.02 0.009
359.34 1.587 1.793 0.019 0.012
361.96 1.576 1.798 0.017 0.012
364.62 1.57 1.806 0.016 0.016
367.32 1.567 1.816 0.013 0.017
370.05 1.564 1.827 0.011 0.016
372.83 1.558 1.833 0.0092 0.015
375.65 1.5554 1.835 0.0078 0.015
378.51 1.5533 1.845 0.0066 0.014
381.42 1.5522 1.851 0.0054 0.013
384.37 1.5509 1.856 0.005 0.011
387.37 1.5497 1.861 0.005 0.009
390.42 1.5465 1.866 0.0046 0.01
393.51 1.5473 1.868 0.005 0.0074
396.65 1.5478 1.8737 0.0052 0.008
399.85 1.5451 1.8775 0.0058 0.0056
403.09 1.5409 1.877 0.0066 0.0062
406.39 1.5401 1.8792 0.0068 0.0042
409.75 1.536 1.8776 0.0076 0.0052
413.15 1.534 1.8783 0.009 0.0044
416.62 1.527 1.8776 0.01 0.0054
420.15 1.522 1.8749 0.011 0.0058
423.73 1.515 1.8712 0.012 0.0076
427.38 1.51 1.8701 0.013 0.0078
431.09 1.5 1.865 0.016 0.01
434.86 1.491 1.859 0.018 0.011
438.7 1.481 1.852 0.02 0.013
442.61 1.469 1.844 0.023 0.015
446.59 1.455 1.834 0.027 0.017
450.65 1.439 1.822 0.031 0.019
454.77 1.416 1.808 0.037 0.02
458.98 1.392 1.793 0.043 0.021
463.26 1.363 1.776 0.051 0.021
467.62 1.328 1.756 0.06 0.019
472.06 1.287 1.736 0.069 0.015
476.59 1.236 1.718 0.077 0.0086
481.21 1.173 1.6986 0.084 0.0038
485.92 1.098 1.687 0.089 0.011
490.72 1.009 1.686 0.091 0.021
495.62 0.913 1.702 0.092 0.031
500.62 0.815 1.736 0.091 0.042
505.71 0.722 1.791 0.088 0.053
510.92 0.637 1.86 0.083 0.063
516.23 0.566 1.938 0.075 0.072
521.65 0.506 2.02 0.067 0.079
527.19 0.455 2.106 0.058 0.083
532.84 0.413 2.192 0.049 0.085
538.62 0.375 2.276 0.041 0.085
544.53 0.343 2.357 0.034 0.084
550.57 0.316 2.439 0.029 0.081
556.74 0.291 2.524 0.025 0.079
563.05 0.271 2.605 0.021 0.077
569.51 0.251 2.686 0.019 0.075
576.12 0.235 2.771 0.016 0.073
582.88 0.219 2.848 0.014 0.071
589.8 0.205 2.928 0.013 0.069
596.89 0.194 3.008 0.011 0.068
604.15 0.182 3.089 0.01 0.066
611.59 0.1705 3.168 0.0094 0.065
619.22 0.1591 3.251 0.0086 0.064
627.03 0.1509 3.333 0.0078 0.063
635.05 0.1426 3.414 0.0074 0.062
643.28 0.1355 3.497 0.0068 0.061
651.72 0.127 3.582 0.006 0.06
660.39 0.1207 3.667 0.0056 0.059
669.29 0.1138 3.756 0.0052 0.058
678.43 0.1088 3.842 0.0048 0.058
687.83 0.1062 3.931 0.0046 0.057
697.49 0.1042 4.024 0.0044 0.056
707.42 0.1035 4.117 0.0044 0.055
717.65 0.1025 4.208 0.0046 0.055
728.17 0.1026 4.305 0.005 0.054
739.01 0.1025 4.399 0.0048 0.053
750.17 0.105 4.497 0.0048 0.053
761.67 0.1061 4.591 0.005 0.052
773.54 0.1065 4.696 0.0054 0.051
785.78 0.1093 4.795 0.0052 0.051
798.41 0.1099 4.899 0.0058 0.05
811.46 0.1116 5.009 0.006 0.05
824.94 0.1144 5.114 0.0058 0.05
838.87 0.1152 5.231 0.0062 0.049
853.28 0.1155 5.343 0.0064 0.049
868.2 0.1225 5.464 0.0072 0.048
883.65 0.1218 5.58 0.0068 0.048
899.66 0.1263 5.708 0.007 0.048
916.26 0.1274 5.835 0.0072 0.048
933.48 0.1305 5.974 0.0072 0.048
951.36 0.1325 6.106 0.0074 0.048
969.94 0.1373 6.251 0.0082 0.048
989.27 0.142 6.397 0.0082 0.048