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식각공정물성 CF2 radical data

CF2 radical data at 30 mTorr (30 sccm)

CF2 radical data at 30 mTorr (30 sccm)

참조표준명 CF2 radical data at 30 mTorr (30 sccm)
참조표준 번호 KSRD.02.2010.007.001.001
DOI 10.20925/KSRD.02.2010.007.001.001
참조표준 등급 유효 참조표준
활성종 종류 CF2
소스가스종류 CF4
플라즈마조건 Chamber working pressure : 30,50, 80, 100, 150, 200 mTorr
CF4 Gas flow = 30, 50, 70, 100 sccm
공정가스: CF4
RF Power range = 200-1000 W
측정대상 측정대상 : CF2 radical data
측정방법 측정방법/절차 : LIF 방법
측정기기 : 레이저 파장=266 nm
CF2 radical의 LIF파장: 325 nm
monochromator: Atogo Triax-320, resolution: 0.06 nm, wavelength: 190-1000 nm
발생방법 및 장치 조건 Transformer Coupled Plasma : 높이300 mm, 내경400 mm

CF2 radical data at 30 mTorr (30 sccm) 참조표준

※ 전자밀도(m-3)
RF Power(W) 전자밀도(m-3) 불확도(±)
200 1.23445E+16 1.360554E+15
225 1.31645E+16 1.38114E+15
250 1.40661E+16 1.4049E+15
275 1.5049E+16 1.432122E+15
300 1.53298E+16 1.440132E+15
325 1.5816E+16 1.45425E+15
350 1.77335E+16 1.512732E+15
375 1.90611E+16 1.555686E+15
400 2.10112E+16 1.622028E+15
425 2.58965E+16 1.802544E+15
RF Power(W) 전자밀도(m-3) 불확도(±)
450 2.70545E+16 1.847862E+15
475 2.60566E+16 1.808754E+15
500 2.65923E+16 1.829664E+15
525 2.91608E+16 1.93236E+15
550 3.09226E+16 2.004882E+15
575 3.36978E+16 2.12211E+15
600 3.61951E+16 2.230302E+15
700 4.21683E+16 2.497398E+15
800 5.45383E+16 3.076392E+15
900 6.43468E+16 3.551076E+15
1000 8.05794E+16 4.353768E+15
※ 전자온도(eV)
RF Power(W) 전자온도(eV) 불확도(±)
200 5.20493 0.81586
225 5.23129 0.816544
250 5.25688 0.817209
275 5.28171 0.817855
300 5.2693 0.817741
325 5.27766 0.818026
350 5.31384 0.818843
375 5.36385 0.819945
400 5.41369 0.821028
425 5.45231 0.821883
450 5.48052 0.822529
RF Power(W) 전자온도(eV) 불확도(±)
475 5.50208 0.82308
500 5.52076 0.823593
525 5.53918 0.824163
550 5.55539 0.824676
575 5.5663 0.825094
600 5.56881 0.825284
700 5.52884 0.824353
800 5.58809 0.824904
900 5.67252 0.826462
1000 5.6892 0.827108
※ CF밀도
RF Power(W) CF밀도 불확도(±)
200 0.96441 0.192308967396
225 1.04716 0.183498149016
250 1.52502 0.162715588308
275 1.53011 0.163414968444
300 1.69128 0.146410431804
325 1.64661 0.125326177704
350 1.58234 0.113662985436
375 1.56934 0.111393428328
400 1.48395 0.111715691724
425 1.52524 0.1
RF Power(W) CF밀도 불확도(±)
450 1.43382 0.1
475 1.37483 0.1
500 1.37087 0.096528172104
525 1.36013 0.10254146994
550 1.24383 0.09520483518
575 1.24516 0.10740970422
600 1.12358 0.105242997132
700 1.09872 0.123646294044
800 0.9879 0.139663470492
900 0.89141 0.163346401764
1000 0.67126 0.19256952078
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